Two-stage polymer embossing of co-planar microfluidic features for microfluidic devices
نویسندگان
چکیده
A two-stage embossing technique for fabricating microchannels for microfluidic devices is presented. A micromachined aluminum mold is used o emboss a polyetherimide (PEI) substrate with a relatively high glass transition temperature (T ). The embossed PEI is then used as a mold for g mbossing an amorphous polyethylene terephthalate (APET) substrate with a lower Tg. The resulting APET substrate has the same features as hose of the aluminum mold. Successful transfer of features from the aluminum mold to the APET substrate was verified by profilometry, and an pplication of this method in production of a microfluidic device is presented. 2008 Elsevier B.V. All rights reserved.
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